Chemical vapour deposition of boron carbide from BBr3CH4H2 mixtures in a microwave plasma
- 1 July 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 188 (1) , 143-155
- https://doi.org/10.1016/0040-6090(90)90200-w
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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