Effects of Corona‐Discharge Induced Oxygen Ion Beams and Electric Fields on Silicon Oxidation Kinetics: I . Ion Beam Effects
- 1 May 1985
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 132 (5) , 1163-1168
- https://doi.org/10.1149/1.2114051
Abstract
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