Two-step etching method for fabrication of fibre probe for photon scanning tunnelling microscope
- 28 October 1993
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 29 (22) , 1978-1979
- https://doi.org/10.1049/el:19931317
Abstract
The authors propose a novel two-step etching method for fabricating a fibre probe, with good reproducibility, for a photon scanning tunnelling microscope. A fibre probe with a cladding diameter of 14μm and cone angle of 20° was fabricated by adjusting the first-step etching time and the composition of the second-step etching solution.Keywords
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