Defect Diagnostic Matrix -a Defect Learning Vehicle For Submicron Technologies

Publisher Website

24 August 2005

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 103-106
https://doi.org/10.1109/icmts.1988.672943

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

On yield, fault distributions, and clustering of particles
IBM Journal of Research and Development, 1986