Erosion of solid neon by keV electrons

Abstract
The erosion of solid neon by keV electrons has been studied experimentally and theoretically. Electronic sputtering as well as temperature-enhanced sublimation are investigated by a frequency-change measurement on a quartz crystal or in some cases by the change in intensity of reflected electrons. The erosion yield increases with increasing temperature for substrate temperatures above 7 K. Below this temperature sputtering via electronic transitions is the dominant process. The yield shows a clear minimum for film thicknesses about (5–7)×1016 Ne atoms/cm2 for 2-keV electrons. The sputtering yield for thick films has a maximum at 1.21.5 keV. The results are explained by the diffusion of excitations to the surface with subsequent decay. From this model and the experimental results one derives a characteristic diffusion length of about 1×1017 Ne atoms/cm2. The eventual particle ejection is driven by decay of surface-trapped excitons or by dissociative recombination. The magnitude of the yield indicates that deexciting neon particles at the surface induce further sputtering. Direct sputtering from electron-nucleus collisions does not contribute significantly to the yield.

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