Anomalous Impurity Diffusion in Epitaxial Silicon near the Substrate

• 1 January 1962
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 109  (11) , 1106
• https://doi.org/10.1149/1.2425248

Abstract

Keywords

• EPITAXIAL SILICON
• SUBSTRATE
• IMPURITY DIFFUSION
• ANOMALOUS IMPURITY
• DIFFUSION IN EPITAXIAL