Action of far-ultraviolet radiation (185 nm) on poly(ethylene terephthalate) films: a method for controlled dry-etching
- 1 December 1982
- Vol. 23 (13) , 1863-1864
- https://doi.org/10.1016/0032-3861(82)90206-3
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Organic photochemistry with 6.7eV photons: decomposition of 1,1-disubstituted cyclopropanes in solutionTetrahedron Letters, 1981
- Photochemical degradation of poly(ethylene terephthalate). IV. Surface changesJournal of Applied Polymer Science, 1973
- Ultraviolet depolymerization of photoresist polymersPolymer Engineering & Science, 1972
- Photochemical degradation of poly(ethylene terephthalate). II. Effect of wavelength and environment on the decomposition processJournal of Applied Polymer Science, 1972
- Photochemical degradation of poly(ethylene terephthalate). III. Determination of decomposition products and reaction mechanismJournal of Applied Polymer Science, 1972
- Photochemical degradation of poly(ethylene terephthalate). I. Irradiation experiments with the xenon and carbon arcJournal of Applied Polymer Science, 1972