A micromachined piezoresistive angular rate sensor with a composite beam structure
- 1 February 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 72 (3) , 217-223
- https://doi.org/10.1016/s0924-4247(98)00220-9
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
- Analysis And Design Concept Of Highly Sensitive Silicon GyroscopePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A silicon micromachined vibrating gyroscope with piezoresistive detection and electromagnetic excitationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Silicon monolithic micromechanical gyroscopePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A bulk micromachined silicon angular rate sensorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A precision yaw rate sensor in silicon micromachiningPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Micromachining inertial instrumentsPublished by SPIE-Intl Soc Optical Eng ,1996
- Polysilicon integrated microsystems: technologies and applicationsSensors and Actuators A: Physical, 1996
- A micromachined vibrating gyroscopeSensors and Actuators A: Physical, 1995
- A study of silicon angular rate sensors using anisotropic etching technologySensors and Actuators A: Physical, 1994
- Piezoelectric beams and vibrating angular rate sensorsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1991