Mechanical and Optical Properties of The Films of Tantalum Oxide Deposited by Ion-Assisted Deposition
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A simple predictive model for spherical indentationJournal of Materials Research, 1993
- Ion-based methods for optical thin film depositionJournal of Materials Science, 1986