Analysis of minority-carrier transport in polysilicon devices
- 1 August 1982
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 29 (8) , 1185-1197
- https://doi.org/10.1109/t-ed.1982.20855
Abstract
Key assumptions are made, with justification, to simplify the three-dimensional, nonlinear boundary-value problem that defines minority-carrier transport, including recombination, in polysilicon devices. These assumptions enable the separation of the grain-boundary recombination analysis, which is based on quasi-equilibrium in the space-charge region, from the intragrain transport analysis, which is done by partitioning the grain into subregions in which the minority-carrier flow is predominantly one-dimensional. The analyses are coupled through the effective minority-carrier recombination velocity at the grain boundary, which generally is dependent on the minority-carrier density in the quasi-neutral grain. Limitations of the model implied by the quasi-equilibrium assumption are effectively removed by recognizing that when conditions obtain that negate quasi-equilibrium, the effective recombination velocity is fixed at the minority-carrier kinetic-limit velocity. The model development is facilitated by computer-aided numerical analysis of the grain-boundary recombination and is supported by qualitative discussion of the underlying physics.Keywords
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