Laser-pulsed thermal chemistry: UV laser-activated oxidation of niobium
- 15 July 1984
- journal article
- research article
- Published by AIP Publishing in The Journal of Chemical Physics
- Vol. 81 (2) , 1019-1023
- https://doi.org/10.1063/1.447737
Abstract
Surface oxidation of niobium metal has been studied under pulsed UV laser (λ=308 nm) exposure at one atmosphere of oxygen. Diffusion apears to dominate this laser‐pulsed thermal chemistry (LPTC) reaction. X‐ray photoelectron spectroscopy reveals a range of niobium oxidation states Nb+5, Nb+4, Nb+2, and Nb metal from the surface to the bulk, respectively. LPTC oxidation depth increases monotonically with repeated laser irradiation unlike infrared laser‐induced pulsed plasma chemistry, which is self‐limiting. Possible electronic contributions to the LPTC process are considered as well as effects due to surface crystal orientation.Keywords
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