High quality 0.98 μm GaInAs/GaAs/GaInP lasers grown by CBE using tertiarybutylarsine and tertiarybutylphosphine

Abstract
HIgh quality GaInAs/GaAs/GaInP laser structures were grown by chemical beam epitaxy using tertiarybutylarsine (TBAs) and tertiarybutylphosphine (TBP) under pulsed conditions. For a 300 μm long cavity, a threshold current density of 390 A/cm2 and external quantum efficiency of 0.6 W/A (two facets) were obtained, which are typical for this kind of structure. This demonstrates the suitability of TBP and TBAs as substitutes of arsine and phosphine in chemical beam epitaxy for laser fabrication.

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