Substrates for HTS Films
- 19 March 1990
- conference paper
- Published by SPIE-Intl Soc Optical Eng
- Vol. 1187, 2-11
- https://doi.org/10.1117/12.965143
Abstract
The novel physical properties of high-temperature superconductors (HTS) have placed unusually severe requirements upon substrate materials to be used for thin film applications. To date, the highest quality thin films have only been produced upon a limited class of crystalline substrate materials while film properties have generally been at best mediocre on most conventional substrates. The ongoing development of in situ film deposition techniques has improved this situation to some extent and the further evolution of film processing promises to expand the selection of useful substrates for HTS films and devices. In this paper we review the current status of substrates for HTS thin film electronic applications and discuss a number of issues pertaining to substrates that continue to play a significant role in the development of HTS thin film technology.© (1990) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.Keywords
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