Defect size distribution in VLSI chips
- 1 January 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Semiconductor Manufacturing
- Vol. 4 (4) , 265-269
- https://doi.org/10.1109/66.97808
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Role of defect size distribution in yield modelingIEEE Transactions on Electron Devices, 1985
- Modeling of defects in integrated circuit photolithographic patternsIBM Journal of Research and Development, 1984
- Modeling of Integrated Circuit Defect SensitivitiesIBM Journal of Research and Development, 1983