Attaining an ultralow outgassing rate of 10−12 Pa m3 s−1 m−2 from an oxygen-free high conductivity copper chamber with beryllium–copper–alloy flanges
- 1 September 1995
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 13 (5) , 2587-2591
- https://doi.org/10.1116/1.579455
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