Optimization Of Micromachined Ultrasound Transducer By Finite Element Simulation
- 24 August 2005
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 620-623
- https://doi.org/10.1109/sensor.1995.721908
Abstract
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This publication has 1 reference indexed in Scilit:
- The dynamic mechanical characteristics of a resonating microbridge mass-flow sensorSensors and Actuators A: Physical, 1991