Modified Detection Arrangement for Scanning Electron Diffraction Instrument
- 1 December 1966
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 37 (12) , 1687-1689
- https://doi.org/10.1063/1.1720085
Abstract
Modifications to the detection arrangement of a scanning electron diffraction apparatus, described by Grigson [Rev. Sci. Instr. 36, 1587 (1965)], have been carried out to (i) permit rejection of inelastically scattered electrons, (ii) provide measurements of the main beam by Faraday cage, and (iii) provide high sensitivity measurements using a semiconductor detector and modulated beam.Keywords
This publication has 3 references indexed in Scilit:
- Improved Scanning Electron Diffraction SystemReview of Scientific Instruments, 1965
- Scanning electron diffraction with energy analysisJournal of Scientific Instruments, 1965
- Some Applications of an Improved Scanning Electron Diffraction SystemNature, 1965