Acid-diffusion effect on nanofabrication in chemical amplification resist

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 2615-2619
• https://doi.org/10.1116/1.586012

Abstract

Keywords

• ACID DIFFUSION
• NANOFABRICATION
• AMPLIFICATION RESIST
• CHEMICAL AMPLIFICATION
• DIFFUSION EFFECT