The Confirmation of the Surface Effect upon Phosphorus Diffusion into Silicon

• 1 November 1974
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 13  (11) , 1899-1900
• https://doi.org/10.1143/jjap.13.1899

Abstract

Keywords

• PHOSPHORUS DIFFUSION
• SURFACE EFFECT
• CONFIRMATION
• EFFECT UPON PHOSPHORUS
• DIFFUSION INTO SILICON