EUREKA's excimers

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Abstract
There is worldwide interest in high-power lasers for use in industrial production. Infrared lasers such as CO2 and YAG are well known in metal cutting, drilling and welding, whereas the applications of excimers lasers are only now beginning to be explored. The reason for this is that these special lasers operating in the ultraviolet, which emit short pulses (about 0.05 μs duration) with very high peak power (more than 10MW) several hundred to a thousand times per second, have only recently achieved high power levels. The generation of microstructures in metal and organic materials, for example for electronic components, and non-thermal material processing of plastics and ceramics are the most important application for excimer lasers.

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