Hexapole-selected supersonic beams of reactive radicals: CF3, SiF3, SH, CH, and C2H

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Abstract
A supersonic corona discharge source was used to produce molecular beams of plasma particles. Neutral, polar components of the plasma mixture were selectively focused by an electrostatic hexapole, thereby “simplifying” the chemical and rotational state composition of the beam. Careful choice of a radical precursor, combined with control of discharge and hexapole voltage allowed the production of pure beams of CF3, SiF3, and SH (purity typically better than 90%), with no noticeable signal arising from undissociated precursor, ions, or other radicals. Focused beams from a hydrocarbon plasma contained a radical mixture of predominantly CH and C2H. Radical beams were characterized by rotationally and translationally cold temperatures (typically TR<20 K and TS<20 K, respectively) and high intensities (typically 1011–1012 cm−2 s−1). Simulated focusing spectra using classical trajectory calculations showed generally good agreement with the experimental data, leading to the first experimental measurement of the permanent electric dipole moment of SiF3 (μ=1.2±0.1 D).