Direct electron-beam patterning for nanolithography

• 1 November 1989
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 7  (6) , 1941-1946
• https://doi.org/10.1116/1.584652

Abstract

Keywords

• NANOLITHOGRAPHY
• DIRECT ELECTRON BEAM
• ELECTRON BEAM PATTERNING