Surface interaction study of TiC single crystal with energetic hydrogen ions by AES and FDS

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Abstract
Changes in atomic composition in the near surface region of single–crystal titanium carbide (TiC) due to hydrogen or deuterium ion irradiation in the keV range were studied with the use of AES (Auger electron spectroscopy) and FDS (flash desorption spectroscopy). Depth profiles obtained with sputter‐AES showed that carbon atoms were preferentially depleted due to the hydrogen ion irradiation. The amount of depleted carbon approached the equilibrium value above the hydrogen ion fluence of 2×1017 ions/cm2. Depth profiles of this depletion region were found to be similar to the damage distributions caused by the incident particles. The depleted region recovered completely by annealing at 1000 °C for 30 s. The result of FDS measurements suggests that the hydrogen atoms which were implanted into the near surface region replaced the carbon atoms of the TiC lattice to form titanium hydride.

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