Polysilicon Thin Film Transistors with Cobalt amd Nickel Silicide Source and Drain Contacts
- 1 January 1996
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Low Temperature Silicides for Poly-Silicon Thin Film Transistor ApplicationsMRS Proceedings, 1995