NONLINEAR SCANNING ELECTRON ACOUSTIC MICROSCOPY
- 1 February 1984
- journal article
- Published by EDP Sciences in Le Journal de Physique Colloques
- Vol. 45 (C2) , C2-869
- https://doi.org/10.1051/jphyscol:19842199
Abstract
Nonlinear scanning electron acoustic microscopy is a special technique of acoustic microscopy which uses amplitudes and phases of higher harmonics, especially the second harmonic, of the sound wave originated by an electron beam modulated at a certain ground frequency. As these harmonics are determined by the nonlinear coupling between sound and the solid , they reveal very sensitively material inhomogeneities with high spatial resolutionKeywords
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