Investigation of the expanding plasma of an anodic vacuum arc

Abstract
An aluminum plasma is produced by an anodic vacuum arc (25 A, 17 V) with a consumable anode. The plasma expands from the anode to the walls and is investigated by Langmuir probes, a quadrupole mass spectrometer, a retarding field ion energy analyzer, and a quartz-crystal oscillator for mass flow detection. The electron density ranges within 2×1015–3×1017 m−3 and the electron temperature within 0.4–0.9 eV. At a target, ion fluxes of 1.5×1019–8×1020 m−2 s−1 and total particle fluxes of 3×1020–4×1021 m−2 s−1 are measured. The ions are accelerated in the expanding plasma towards the target and gain a few eV. By a simple collisionless transport model of the expanding plasma, the plasma potential and floating potential are calculated and compared with experimental data.

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