Backscattering method possibilities for precise determination of the oxygen profile in oxide films by the use of the elastic resonance in reaction 16O(4He, 4He)16O at 3.045 MeV of 4He
- 1 August 1992
- journal article
- Published by Wiley in Surface and Interface Analysis
- Vol. 18 (8) , 585-588
- https://doi.org/10.1002/sia.740180803
Abstract
No abstract availableKeywords
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