Possibilities and limitations of large-scale electron-beam evaporation

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Abstract
Axial guns of 250 kW yield deposition rates of 20 μm/s. The scatterting losses at the generated vapor cloud are in the order of 10%–20%. High power densities and suitable electron-beam programming open up new paths to achieve deposition rates of more than 50 μm/s. Studies with reference to the corrosion-inhibiting action of evaporated aluminium layers have shown that a film thickness of 1.5 μm is adequate for a great many applications.

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