High-density–speed optical near-field recording–reading with a pyramidal silicon probe on a contact slider

We demonstrate high-density–speed phase-change recording–reading by use of a pyramidal silicon structure. The contact slider, which has a pyramidal silicon probe array with height dispersion of less than 10 nm, is fabricated by use of a silicon-on-insulator wafer. By illumination with a laser beam $\left(\lambda =830 \mathrm{nm}\right)$ of one element of the probe array, we find the shortest phase-change mark length and the carrier-to-noise ratio to be 110 nm and 10 dB, respectively, corresponding to a data transmission rate of 2.0 MHz. This rate can be increased to 200 MHz by use of all elements of the probe array.