THE DETECTION OF OIL OR MERCURY ON SURFACES IN VACUUM SYSTEMS USING AN ELLIPSOMETER
- 15 April 1968
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 12 (8) , 265-266
- https://doi.org/10.1063/1.1651985
Abstract
The application of an ellipsometer to the detection of oil or mercury contamination of surfaces in vacuum systems is discussed. Tables giving instrument readings for these contaminants on appropriate substrates illustrate the feasibility of the technique.Keywords
This publication has 2 references indexed in Scilit:
- Optical Constants of a Clean Mercury Surface as a Function of TemperatureJournal of the Optical Society of America, 1967
- Determination of the Properties of Films on Silicon by the Method of EllipsometryJournal of the Optical Society of America, 1962