Fabrication of Size-Tunable Large-Area Periodic Silicon Nanopillar Arrays with Sub-10-nm Resolution
- 20 August 2003
- journal article
- research article
- Published by American Chemical Society (ACS) in The Journal of Physical Chemistry B
- Vol. 107 (37) , 9950-9953
- https://doi.org/10.1021/jp035468d
Abstract
No abstract availableKeywords
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