Selective Low Pressure Chemical Vapor Deposition of Tungsten

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Abstract
A series of trivalent and tetravalent metal phthalocyanines (Pc) has been examined in thin film form on metal substrates by electron microscopy, UV‐visible spectrophotometry, and electrochemical and photoelectrochemical techniques. These Pc's are compared with other divalent metal and demetallated phthalocyanines. The tri‐ and tetravalent phthalocyanines show enhanced photoresponses vs. the divalent metal and demetallated systems. This enhanced activity correlates with their broadened and red‐shifted visible spectra and their tendency to grow as block‐like or platelet‐like microcrystals in the thin film. The divalent and demetallated Pc's grow as smaller, needle‐like deposits with poor photoresponses. The trivalent and tetravalent Pc's have been grown in this study as thin films that act as highly doped p‐type photoelectrodes or as nearly intrinsic photoconductors, exhibiting both positive and negative photopotentials, depending upon the of the redox couple.

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