Nitrides of titanium, niobium, tantalum and molybdenum grown as thin films by the atomic layer epitaxy method
- 1 December 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 166, 149-154
- https://doi.org/10.1016/0040-6090(88)90375-6
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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