Time-of-flight secondary ion mass spectrometry of insulators with pulsed charge compensation by low-energy electrons

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Abstract
A new charge compensation system for time-of-flight (TOF) secondary ion mass spectrometry is described. A pulsed low-energy electron source (10 eV) in combination with a pulsed extraction voltage of the TOF analyzer allows low-energy electrons to reach the target in the relatively long period of time between two excitation pulses. Low-energy electrons allow self-adjusting of the surface potential. Sample damages by these electrons are not detectable. Effects due to electron stimulated desorption are suppressed by pulsing the anode of the electron source. Compensation is possible for the accumulation of positive as well as negative spectra. With this experimental arrangement we investigated a variety of insulating materials (e.g., thick polymer films, glasses, ceramics). In all cases we found stable and reproducible spectra, even of insulators with extremely low conductivity.

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