Remarks on the Calculation of Energy Loss in Electron-Resist Films on Substrates

• 1 September 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (9) , 1671-1672
• https://doi.org/10.1143/jjap.17.1671

Abstract

Keywords

• ELECTRON RESIST
• RESIST FILMS
• ENERGY LOSS
• SUBSTRATES
• CALCULATION
• REMARKS