Improved Interface in Inversion-Type InP-MISFET by Vapor Etching Technique

• 1 November 1980
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 19  (11) , 2151-2156
• https://doi.org/10.1143/jjap.19.2151

Abstract

Keywords

• IMPROVED INTERFACE
• TYPE INP
• INP MISFET
• VAPOR ETCHING
• ETCHING TECHNIQUE
• INVERSION TYPE
• INTERFACE IN INVERSION