Evaluation of Interfacial Nitrogen Concentration of RTP Oxynitrides by Reoxidation

1 June 1993

journal article
Published by The Electrochemical Society in Journal of the Electrochemical Society

Vol. 140 (6) , L87-L89
https://doi.org/10.1149/1.2221650

Abstract

We prepared oxynitrides with different interfacial nitrogen concentration using RTP. Reoxidation kinetics of these oxynitrides was studied. It was found that reoxidation thickness strongly depends on the . The reoxidation kinetics can be used for the evaluation of.

Keywords

THICKNESS
RTP OXYNITRIDES
CONCENTRATION OF RTP
INTERFACIAL NITROGEN CONCENTRATION