Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Dependence on Oxide Particle Density and Cooling Rate
- 1 January 1991
- journal article
- Published by Trans Tech Publications, Ltd. in Solid State Phenomena
- Vol. 19-20, 39-44
- https://doi.org/10.4028/www.scientific.net/ssp.19-20.39
Abstract
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