Growth processes of particles in high frequency silane plasmas

• 1 March 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 14  (2) , 540-545
• https://doi.org/10.1116/1.580141

Abstract

Keywords

• GROWTH PROCESSES
• FREQUENCY SILANE
• SILANE PLASMAS
• PARTICLES
• HIGH FREQUENCY