High Efficiency Switchless Operation Of A 0.5 J UV Preionized Excimer Laser

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Abstract
Operation of the discharge excimer laser in the "switchless" mode offers an interesting opportunity for high average power industrial excimer laser design. Its potential for high efficiency, energy and repetition rate has been recently investigated and fullfills early expectations. When properly used, U.V. corona preionization still remains attractive for active volumes below one liter and must be taken into account among the various trade off for future products in the 1kW average power range.

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