In situ etching of GaAs using AsCl3 in MOVPE. II
- 30 November 1982
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 60 (1) , 131-135
- https://doi.org/10.1016/0022-0248(82)90181-6
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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