A new SnO2 low temperature deposition technique for integrated gas sensors
- 1 August 1993
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 15 (1-3) , 63-67
- https://doi.org/10.1016/0925-4005(93)85028-9
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Integrated semiconductor gas sensors evaluation with an automatic test systemSensors and Actuators B: Chemical, 1990
- Semiconductor gas sensorsSensors and Actuators, 1981