Analyse dünner Schichten mittels Massenspektrometrie zerstäubter Neutralteilchen / Thin film analysis by sputtered neutral mass spectrometry
- 1 December 1986
- journal article
- research article
- Published by Walter de Gruyter GmbH in TM - Technisches Messen
- Vol. 53 (JG) , 407-413
- https://doi.org/10.1524/teme.1986.53.jg.407
Abstract
Article Analyse dünner Schichten mittels Massenspektrometrie zerstäubter Neutralteilchen / Thin film analysis by sputtered neutral mass spectrometry was published on December 1, 1986 in the journal tm - Technisches Messen (volume 53, issue JG).Keywords
This publication has 0 references indexed in Scilit: