Reactive Ion Etching of GaN Thin Films

This publication has 4 references indexed in Scilit:

• Reactive ion etching of gallium nitride in silicon tetrachloride plasmasa)
  Applied Physics Letters, 1993
• Growth of GaN by ECR-assisted MBE
  Physica B: Condensed Matter, 1993
• Dry etching of thin-film InN, AlN and GaN
  Semiconductor Science and Technology, 1993
• Electrolytic Etching of GaN
  Journal of the Electrochemical Society, 1972