Studies on gas-switching sequences influence on the quality of MOVPE InGaAs/InP superlattice structures

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23 December 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/iciprm.1996.492293

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X-ray diffractometric characterization of the GaAsP/GaAs and InGaAs/GaAsP superlattices grown on offcut GaAs(001) substrate by means of the reciprocal space mapping
Applied Physics Letters, 1994