Space- and time-resolved measurements of CF and CF2 radicals in high density CF4 plasmas by laser-induced fluorescence
- 23 October 1995
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 67 (17) , 2569-2571
- https://doi.org/10.1063/1.114435
Abstract
Ground-state CF and CF2 radicals in CF4 helicon plasmas of high density were detected by laser-induced fluorescence (LIF). The LIF was used to measure the spatial and temporal variations of CFx concentrations. The CF2 concentration increases near 5–10 ms after the extinction of rf power, and the degree of this increase depends upon the discharge condition; plasma duration, plasma density, and CF4 pressure. The result indicates that this behavior in the afterglow is closely related to the interactions of the rf-on phase between radicals and a quartz surface with deposited fluorocarbon polymers.Keywords
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