CHARGE STORAGE ON SMALL METAL PARTICLES

Abstract
Small metal particles (SMP) have been incorporated into a multilayered metal‐insulator‐semiconductor structure consisting of thermally oxidized Si, SMP, a second insulator, and a top metal electrode. The SiO2 thickness is kept < 30 Å, permitting tunneling of charge carriers between the Si and the discrete states of the SMP. The charge thus stored on the SMP causes a large, controllable hysteresis in the capacitance‐voltage characteristic of the structure which is described in terms of an energy‐level model.

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