CHARGE STORAGE ON SMALL METAL PARTICLES
- 1 April 1971
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 18 (7) , 267-269
- https://doi.org/10.1063/1.1653657
Abstract
Small metal particles (SMP) have been incorporated into a multilayered metal‐insulator‐semiconductor structure consisting of thermally oxidized Si, SMP, a second insulator, and a top metal electrode. The SiO2 thickness is kept < 30 Å, permitting tunneling of charge carriers between the Si and the discrete states of the SMP. The charge thus stored on the SMP causes a large, controllable hysteresis in the capacitance‐voltage characteristic of the structure which is described in terms of an energy‐level model.Keywords
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