Computational model of reactive sputtering
- 1 May 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 11 (3) , 701-703
- https://doi.org/10.1116/1.578794
Abstract
The model of reactive sputtering is modified to contain only measurable integral characteristics such as total current, discharge power, target erosion rate and volt–ampere characteristics for sputtering in metallic and reactive modes. Calculation results for Zn/ZnO and Zr/ZrN are in good agreement with experimental data.This publication has 0 references indexed in Scilit: