Anomalous Vapor Transport Reaction of GaAs with AsCl3in H2Gas Flow System

• 1 October 1975
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 14  (10) , 1451-1458
• https://doi.org/10.1143/jjap.14.1451

Abstract

Keywords

• GAAS
• ANOMALOUS VAPOR
• VAPOR TRANSPORT REACTION
• H2GAS FLOW
• ASCL3IN