Measurements of the back-scattering and absorption of 15-60 keV electrons for transparent solid films at various angles of incidence

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Abstract
The fractions of 15 to 60 keV electrons back-scattered from and absorbed in transparent polycrystalline films of Al and Au have been measured at angles of incidence from 0 degrees , i.e. normal incidence to 80 degrees . Subtracting the sum of both these fractions from unity, the fraction of electrons transmitted through a film is determined. The experimental data for back-scattering and transmission are fitted by empirical expressions as functions of film mass-thickness, incident electron energy, and angle of incidence. Results for back-scattering are compared with the predictions of Niedrig's (1981) and Werner's (1982) analytic model.